electron beam lithography

常見例句

Electron Beam Lithography;
電子束曝光系統(tǒng)；
The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-ray lithography was reported.
針對X射線透射光柵攝譜儀中的高線密度光柵，研究了采用電子束曝光和X射線曝光技術(shù)結(jié)合制作高線密度X射線透射光柵的工藝技術(shù)。
This paper introduces the development of electron beam lithography around the world and basic fundamentals of pattern generator.
論文分析了國內(nèi)外電子束曝光技術(shù)的發(fā)展和圖形發(fā)生器的工作原理。