electrostatic actuator

基本解釋

The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator.
上述檢測(cè)電路檢測(cè)上述靜電型致動(dòng)器的上述絕緣膜中所積蓄的上述電荷量。
ip.com
The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.
上述偏置電路根據(jù)上述存儲(chǔ)電路存儲(chǔ)的上述檢測(cè)結(jié) 果，使用于驅(qū)動(dòng)上述靜電型致動(dòng)器的驅(qū)動(dòng)電壓變化。
ip.com
According to the calibration principle of electrostatic actuator and the mechanics of piezoelectric ceramic, this thesis developed auto-calibration method of hydrophone.
介紹了微執(zhí)行器的驅(qū)動(dòng)方式及各自的優(yōu)缺點(diǎn)、靜電梳齒結(jié)構(gòu)的特點(diǎn)和應(yīng)用以及靜電梳齒結(jié)構(gòu)的工作原理。