electrostatic actuator

基本解釋

The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator.
上述檢測電路檢測上述靜電型致動器的上述絕緣膜中所積蓄的上述電荷量。
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The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.
上述偏置電路根據(jù)上述存儲電路存儲的上述檢測結(jié) 果，使用于驅(qū)動上述靜電型致動器的驅(qū)動電壓變化。
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According to the calibration principle of electrostatic actuator and the mechanics of piezoelectric ceramic, this thesis developed auto-calibration method of hydrophone.
介紹了微執(zhí)行器的驅(qū)動方式及各自的優(yōu)缺點(diǎn)、靜電梳齒結(jié)構(gòu)的特點(diǎn)和應(yīng)用以及靜電梳齒結(jié)構(gòu)的工作原理。