etching paper

基本解釋

This paper designs an etching system with constant temperature for etching process in MEMS manufacture.
本文設(shè)計了一個恒溫腐蝕系統(tǒng)，用于微機械加工制作中的腐蝕工藝。
Based on electrochemical etching principles, the paper fabricated the micrometer scale wire electrodes used in WEMM.
本文基于電化學(xué)腐蝕原理，制備微細(xì)電化學(xué)線切割加工中使用的微米尺度線電極。
A technique for the fabrication of silicon cone cathode array by using anisotropic and isotropic etching has been reported in this paper.
詳細(xì)研究了利用硅的各向異性腐蝕、各向同性腐蝕制備硅錐陰極陣列的工藝。