heavy boron-diffusion

Heavy boron-diffusion and self-stopped etch technique is a universal means to control the thickness accurately in micromachining. It is widely used in the micromachining process of inertial devices, such as gyroscope and micro-accelerometer.
濃硼擴(kuò)散腐蝕自停止工藝是微機(jī)械加工中用于精確控制厚度尺寸的常用工藝,被廣泛應(yīng)用于微陀螺、微加速度計等慣性器件的加了工藝中。