microwave plasma cvd

基本解釋

The diamond films were fabricated by microwave plasma CVD and the boron-doped was created by the cold ion implantation.
本文采用微波等離子體CVD法制備定向生長的金剛石薄膜。用冷離子注入法對(duì)金剛石薄膜進(jìn)行硼摻雜。
The linearly coaxially coupled microwave plasma CVD device is a new microwave plasma CVD device bringing an axial extended plasma cylinder through a microwave antenna.
線形同軸耦合式微波等離子體CVD裝置是一種利用微波天線產(chǎn)生軸向分布的等離子體柱的新型微波等離子體CVD裝置。
In this paper, morphologies of poly crystal line diamond film and epitaxial single-crystal diamond film by microwave plasma CVD method were reported, the causes of these morphologies were analyzed.
本文給出了微波等離子體化學(xué)氣相沉積多晶金剛石薄膜及外延單晶金剛石薄膜的各種形貌，并對(duì)這些形貌的形成做了理論分析。