slurry polishing

基本解釋

Chemical mechanical polishing Rough surface Microscale flow Polishing slurry;
化學(xué)機械拋光；粗糙表面；微尺度流動；拋光液；
Laser inducement fluorescence (LIF) is used to study the effect of polishing parameters on slurry film thickness.
本文采用激光誘導(dǎo)熒光技術(shù)（LIF）來研究拋光參數(shù)對化學(xué)機械拋光加工區(qū)液膜厚度的影響。
The study indicates that the thickness of slurry layer increases with increasing polishing speed and the increasing trend decreases with increasing polishing rotational speed.
研究表明，拋光液膜厚度隨著拋光速度的增加而增加，增加的趨勢隨拋光轉(zhuǎn)速的提高而減緩。