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常見例句
- This paper describes the development of phase shifting lithography and its applications in ULSI technology.
本文綜述了相移光刻技術的發(fā)展及其在ULSI中的應用。 - Dishing problem of copper multilayer interconnection in ULSI was introduced, and the reasons and influencing factors were analyzed.
介紹了ULSI多層銅互連線中的碟形坑問題,對其產(chǎn)生的原因及影響因素進行了分析。 - In this thesis, we focuse on the microstructure and stress of ULSI Cu interconnects with their impacts on MTF of the electromigration.
本論文主要研究了ULSI中銅互連線的微觀結構和應力及其對與電徙動MTF的影響。 返回 ulsi