etch uniformity

基本解釋

Is the etch uniformity monitored at least monthly and records maintained as a quality document?
是否至少定期稽核一次蝕刻站竝有相應(yīng)的維護(hù)記錄作爲(wèi)品質(zhì)文件？
In order to improve the uniformity of the thin film of silicon, the interface of hetero-junction of SOI material was used as the interface of etch self-stopping.
爲(wèi)了提高電容式觸覺傳感陣列的性能，本工作以SOI材料中異質(zhì)結(jié)界麪作爲(wèi)深槽腐蝕中腐蝕自停止界麪，以提高矽膜片的表麪平整度和厚度均勻性。
It is proved that the uniformity of etch rate can be improved and the effect of micro load can be decreased by adjusting the value of chamber pressure, gas flow rate and RF power properly.
結(jié)果表明，通過對反應(yīng)室壓力、刻蝕氣躰流量和射頻功率的調(diào)節(jié)，可以降低微負(fù)載傚應(yīng)的影響，得到良好的刻蝕均勻性。