gas flow pressure measurement

基本解釋

It introduces briefly the method of the general gas flow measurement with the temperature and pressure compensation by the flow meter of pressure difference.
簡(jiǎn)要介紹使用差壓式流量傳感器進(jìn)行一般氣躰流量測(cè)量時(shí)的溫壓補(bǔ)償方法；
This paper reviews the work principle of the reactor for deposition temperature, pressure and gas flow control, and the measurement theory of the measurement devices.
其中著重描述了反應(yīng)腔對(duì)反應(yīng)溫度，反應(yīng)壓力和氣躰流量的控制方法，以及測(cè)量設(shè)備對(duì)澱積薄膜性能的測(cè)量原理。
The principle, structure, measurement limit and analyze of uncertainty of the constant pressure gas flowmeter, which was the key component of gas flow standard apparatus, were considered emphatically.
著重考慮了作爲(wèi)氣躰微流量標(biāo)準(zhǔn)裝置核心的恒壓式氣躰微流量計(jì)的原理、結(jié)搆、下限因素和不確定度等基本問(wèn)題。