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High-precision prealigner is a crucial component in wafer transport device for modern photolithographer. 摘要高精度的預(yù)對(duì)準(zhǔn)是設(shè)計(jì)現(xiàn)代光刻機(jī)矽片傳輸系統(tǒng)需要解決的核心問題之一。