ECRCVD
基本解釋
- 微波電子回旋共振等離子體
英漢例句
- High quality a-Si: H thin films deposited with high rate by HW-MW ECRCVD
法高速沉積優(yōu)質(zhì)氫化非晶硅薄膜 - Studies of Structure and Properties for a-C:F:H Films Deposited by Micro-Wave ECRCVD
微波ECRCVD制備a-C:F:H薄膜的結(jié)構(gòu)與性能研究