常見例句High quality a-Si: H thin films deposited with high rate by HW-MW ECRCVD 法高速沉積優(yōu)質(zhì)氫化非晶硅薄膜Studies of Structure and Properties for a-C:F:H Films Deposited by Micro-Wave ECRCVD 微波ECRCVD制備a-C：F：H薄膜的結(jié)構(gòu)與性能研究 返回 ECRCVD